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SELF-CONTAINED VARIABLE RANGE ESV SENSOR BASED ON MICRODEFLECTION TECHNOLOGY

IP.com Disclosure Number: IPCOM000026268D
Original Publication Date: 1991-Feb-28
Included in the Prior Art Database: 2004-Apr-05
Document File: 4 page(s) / 206K

Publishing Venue

Xerox Disclosure Journal

Abstract

Described is a potentially low cost, very compact and self-contained Electrostatic Voltmeter (ESV) sensor head based on silicon microdeflector technology. The ESV is expected to have relatively high accuracy and variable range. The proposed structure is that of a torsional see-saw.

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XEROX DISCLOSURE JOURNAL

SELF-CONTAINED VARIABLE Proposed Classification RANGE ESV SENSOR BASED ON
MICRODEFLECTION
Int. C1. GOlr 11/52 TECHNOLOGY
Martin E. Banton
Joseph J. Daniele

US. C1.324/060

 DIFF. CAPAC.

CI RCUlTR Y

20

FIG. I

XEROX DISCLOSURE JOURNAL - VoI. 16, No. 1 .lanuarb, Fehrdar? 1991 3

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SELF-CONTAINED VARIABLE RANGE ESV SENSOR BASED ON MICRODEFLECTIONTECHNOLOGY(Cont'd)

FIG. 2

4 XEROX DISCLOSURE JOURNAL - Vol. 16, No. 1 January/February 1991

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Page 3 of 4

SELF-CONTAINED VARIABLE RANGE ESV SENSOR BASED ON MICRODEFLECTION TECHNOLOGYtCont'd)

Described is a potentially low cost, very compact and self-contained Electrostatic Voltmeter (ESV) sensor head based on silicon microdeflector technology. The ESV is expected to have relatively high accuracy and variable range. The proposed structure is that of a torsional see-saw.

Figure 1 schematically represents the torsional structure ESV circuit 10 with associated drive electrodes 12, 14 and sense electrodes 16 18. Drive electrode 12 would be connected to a voltage kVppm that is some set fraction of k of the voltage on a photoreceptor Vpm. Sense electrodes 16, 18 are connected to circuitry that measures the difference in capacitance between sense electrode 12, 14 and the bottom electrode (not shown). A nulling voltage, VNL-LL, is produced which is applied to drive electrode 14. When the difference in the capacitance of sense electrodes 16, 18 relative to the bottom electrode is zero, VxULL=k...