Browse Prior Art Database

METHOD TO NORMALIZE CURRENT AND LINEARIZE DEFLECTION IN THE FIST ION SYSTEM

IP.com Disclosure Number: IPCOM000026686D
Original Publication Date: 1993-Apr-30
Included in the Prior Art Database: 2004-Apr-06
Document File: 8 page(s) / 283K

Publishing Venue

Xerox Disclosure Journal

Abstract

As illustrated in Figure 1, the focused ion stream (FIST) ion writing system uses a large ion aperture 12 to generate a linear two axis array of hi hly

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XEROX DISCLOSURE JOURNAL

METHOD TO NORMALIZE CURRENT AND LINEARIZE DEFLECTION IN THE FIST ION SYSTEM
Frank C. Genovese

A' B' C'

Proposed Classification

U.S. C1.355/219

Int. C1. G03g 15/02

FIG. 1

XEROX DISCLOSURE JOURNAL - Vol. 18, No. 2 MarcldAprill993 153

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METHOD TO NORMALIZE CURRENT AND LINEARIZE DEFLECTION IN THE FIST ION SYSTEM (Cont'd)

28 POSITION

                                   Position 20x1 0 DAC Deflection

EPROM Electrodes

dL 34 AMPS

INTENSITY Current

38

54 HV

32

Address Counter r

CLK 4 4 RESET

20x8 ing I Control DAC

System

- Feed back

-

w ----- i 30
Data to
Apertures
-

-

FIG. 2

154 XEROX DISCLOSURS JOURNAL - Vol. 18, No. 2 MarcMApril 1993

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METHOD TO NORMALIZE CURRENT AND LINEARIZE DEFLECTION IN THE FIST ION SYSTEM (Cont'd)

FIG. 3A

-

-60x8 Counter EPROM \

Beam onfoff

Clock Reset

Data

Deflection

Current

Machine 4 I

-------- I

- Clk

I-. I I I

54 f t

  Optional Aperture Gating

- 36

XEROX DISCLOSURE JOURNAL - Vol. 18, No. 2 MarcWAprill993 155

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METHOD TO NORMALIZE CURRENT AND LINEARIZE DEFLECTION IN THE FIST ION SYSTEM (Cont'd)

156 XEROX DISCLOSURE JOURNAL - Vol. 18, No. 2 MarchfApril 1993

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METHOD TO NORMALIZE CURRENT AND LINEARIZE DEFLECTION IN THE FIST ION SYSTEM (Cont'd)

FIG. 4

XEROX DISCLOSURE JOURNAL - Vol. 18, No. 2 MarcWAprill993 157

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METHOD TO NORMALIZE CURRENT AND LINEARIZE DEFLECTION IN THE FIST ION SYSTEM (Cont'd)

As illustrated in Figure 1, the focused ion stream (FIST) ion writing system uses a large ion aperture 12 to generate a linear two axis array of hi hly

driven deflection structure 22 and 24 to address the focused spots A', B' and C' on the receiver 16 into a continuous raster scan line. Gating potentials 18 and 20 that cut off the ion flow 26 through aperture 12 are timed to coincide with those raster positions, where charge is not to be deposited on the receiver 16. Because of geometrical occultation and internal field changes in the aperture 12 when high deflection field are applied, the net current flowing through the aperture 12 is a function of deflection angle.

focused ion beams A, B, and C from coronode 14 which is followed by a

k ield

Proposed is a method by which ion source strength can be modulated to compensate for the differences in throughput as a function of deflection by means of a programmable corotron current source. In the first embodiment, a look up table provides the correction voltages; in the second embodiment, a feedback loop is used to monitor the throughput current delivered by test apertures.

Referring again to Figure 1 where the general FIST aperture layout being considered is shown, the apertures are typically up to 40 mils in diameter and on 20 to 40 mil centers. Application of the b...