Browse Prior Art Database

ROTATING CRUCIBLE SHIELD

IP.com Disclosure Number: IPCOM000026744D
Original Publication Date: 1993-Jun-30
Included in the Prior Art Database: 2004-Apr-06
Document File: 4 page(s) / 98K

Publishing Venue

Xerox Disclosure Journal

Abstract

A rotating crucible shield for use in metal evaporative coating processes is disclosed. The crucible shield is rotatable both above and below a crucible area in a vacuum deposition coating chamber. The shield may be, for example, a semi-circular shutter that encloses an evaporation boat within the crucible area during evaporation. The shield prevents fractionation of multiple element alloys during evaporation coating processes. The shield may be kept at ambient temperature or may be optionally heated to minimize coating that takes place on the shield itself. As shown in Figure lA(end view) and 1B (side view) a crucible support assembly 1 is covered by rotatable shutter 2 (in closed position) by engaging rotatable shaft 3. The crucible may be uncovered by rotating the shaft 3 to shutter position 4 (open position).

This text was extracted from a PDF file.
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Page 1 of 4

XEROX DISCLOSURE JOURNAL

ROTATING CRUCIBLE SHIELD

Classification Proposed L. John Potter

U.S. C1.430/059
Int. C1. G03g 05/06

I I

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FIG. IA

FIG. IB

XEROX DISCLOSURE JOURNAL - Vol. 18, No. 3 May/June 1993 311

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Page 2 of 4

ROTATING CRUCIBLE SHIELD (Cont'd)

-2 2

FIG. 2A

FIG. 26

312 XEROX DISCLOSURE JOURNAL - Vol. 18, No. 3 May/June 1993

[This page contains 1 picture or other non-text object]

Page 3 of 4

ROTATING CRUCIBLE SHIELD (Cont'd)

A rotating crucible shield for use in metal evaporative coating processes is disclosed. The crucible shield is rotatable both above and below a crucible area in a vacuum deposition coating chamber. The shield may be, for example, a semi-circular shutter that encloses an evaporation boat within the crucible area during evaporation. The shield prevents fractionation of multiple element alloys during evaporation coating processes. The shield may be kept at ambient temperature or may be optionally heated to minimize coating that takes place on the shield itself. As shown in Figure lA(end view) and 1B (side view) a crucible support assembly 1 is covered by rotatable shutter 2 (in closed position) by engaging rotatable shaft 3. The crucible may be uncovered by rotating the shaft 3 to shutter position 4 (open position).

The shutter may be operated manually using rotatable shaft 3 that feeds through the crucible coater as shown in Figure 1A and 1B or mechanically manipul...