Browse Prior Art Database

Design and method to improve the mechanical properties of a MEMS design using a ridge in the structural layer (a.k.a. Mechanical Stiffening from Underlying Topography)

IP.com Disclosure Number: IPCOM000028364D
Publication Date: 2004-May-12
Document File: 3 page(s) / 30K

Publishing Venue

The IP.com Prior Art Database

Abstract

In a member of a micro-machined (surface micromachining) device, varying the mechanical properties (e.g. spring properties) of the member by adding a ridge to the member (e.g. by the use of underlying structures to create a corrugation in the structural layer so placed to improve the mechanical properties of the design in the structural layer. The invention permits, among other things, a change the vertical spring constant independent of the lateral spring constant. Keywords: MEMS, surface micromachining; mechanical properties; stiffness; spring; ridge; corrugation.

This text was extracted from a Microsoft Word document.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 53% of the total text.

Design and method to improve the mechanical properties of a MEMS design using a ridge in the structural layer (a.k.a. Mechanical Stiffening from Underlying Topography)

Abstract:

In a member of a micro-machined (surface micromachining) device, varying the mechanical properties (e.g. spring properties) of the member by adding a ridge to the member.  This can be done by standard semiconductor processing means, including by the use of underlying structures to create a corrugation in the structural layer so placed to improve the mechanical properties of the design in the structural layer.  The invention permits, among other things, a change the vertical spring constant independent of the lateral spring constant. 

Keywords: MEMS, surface micromachining; mechanical properties; stiffness; spring; ridge; corrugation. 

The problem:

In surface micromachining the structural layer(s) thickness is usually uniform, limited by practical manufacturing limitations for large sheets of relatively thick material.  This makes it difficult to change the vertical spring constant independent of the lateral spring constant.  In many structural designs it is desirable to be able to do this. 

The solution:

This invention is to create a vertical ridge in a surface layer to create a vertical stiffener, i.e., a corrugation, to increase the apparent vertical thickness in a localized fashion.  The key concept here is the ridge that provides a change in the spring characteristics of the member.  The invention permits, among other things, a change the vertical spring constant independent of the lateral spring constant. 

The concept of employing a ridge to change the properties of the member could be used in any dimension (vertical; horizontal; top surface; bottom surface; side surface; etc.) and is not limited to the vertical dimension.  It is not limited to applications where a change the vertical spring constant independent of the lateral spring constant. 

Variations on the theme would be ...