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Method for a supporting, leveling, and vibration-tuning capability for use with beam path and turning optics for the installation of excimer lasers

IP.com Disclosure Number: IPCOM000029142D
Publication Date: 2004-Jun-16
Document File: 4 page(s) / 204K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for a supporting, leveling, and vibration-tuning capability for use with beam path and turning optics for the installation of excimer lasers. Benefits include improved functionality.

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Method for a supporting, leveling, and vibration-tuning capability for use with beam path and turning optics for the installation of excimer lasers

Disclosed is a method for a supporting, leveling, and vibration-tuning capability for use with beam path and turning optics for the installation of excimer lasers. Benefits include improved functionality.

Background

      A concrete fabrication floor, without modification, is not compliant with a scanner manufacturer’s requirements for levelness of the laser beam path.

      Supporting the beam tube and turning optics used in subfabrication laser installation for semiconductor lithography processing is complicated by the following factors:
•             Uneven fabrication floor surface
•             Penetrations in fabrication floor surface under the beam tube path

•             Tight vibration requirements for the tube and optical elements

      The uneven fabrication floor surface is conventionally accommodated by placing shim plates under support plates for the beam tube and turning optics. Due to their area, these shim plates do not provide the fine, localized correction required to enable the beam tube and turning optics to be level or coplanar.

      No solution exists to address vibration tuning for the beam tube or turning optics.

General description

      The disclosed method includes a pair of 1-inch thick stainless steel plates that are drilled and tapped to mount optics onto a plate, mount the plate into a floor, and provide counterforce in four locations to enable vibration tuning. One plate secures a section of the beam tube. The other plate secures the turning optics as the beam path transitions from fabrication to subfabrication.

      Both plates are vibration tunable. A threaded rod contains a double-nut on the bottom of the plate to provide adjustable (x, y) and height (z) location-specific tension. This arrangement enables the variable vibration characteristics required for laser beam optical components.

      The beam tube plate is oversized in length to provide flexibility in placement relative to fabrication floor penetrations between the fabrication and subfabrication.

      The turning optics plate contains a hole that when installed aligns the laser beam turning optics with the fabrication floor penetration to secure the beam pa...