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Method for a sensor on an air-bearing platform equipped with wireless connectivity

IP.com Disclosure Number: IPCOM000030112D
Publication Date: 2004-Jul-28
Document File: 2 page(s) / 15K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for a sensor on an air-bearing platform equipped with wireless connectivity. Benefits include improved functionality and improved performance.

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Method for a sensor on an air-bearing platform equipped with wireless connectivity

Disclosed is a method for a sensor on an air-bearing platform equipped with wireless connectivity. Benefits include improved functionality and improved performance.

Background

      Light source detection is required within a tool. Conventionally, the problem is solved by a fixed-place detector designed into a tool air-bearing stage. This detector does not perform the required functions for qualification as a laser writing tool.

      The conventional solution does not support taking any measurements of the UV source at the reticle. The capability to monitor the performance of a laser writer tool to make mask patterns is limited.

      A reticle (or mask) is used in lithography for the purpose of writing patterns onto wafers.

General description

      The disclosed method includes a quartz box with the same form factor as a mask reticule, which is 6”x6”x1/4”. A cavity is available inside the box for a wireless communication processor, control electronics, and detectors. This approach enables the device to be placed in the laser writer tool without disturbing it. The box is made of quartz so that the detectors can be illuminated by the light source of the tool.

              The key design element of this approach is the inclusion of the wireless detection in a small form-factor quartz box.

Advantages

The disclosed method provides advantages, including:

•             Impro...