Browse Prior Art Database

Method for HDP v-springs

IP.com Disclosure Number: IPCOM000030175D
Publication Date: 2004-Jul-30
Document File: 1 page(s) / 7K

Publishing Venue

The IP.com Prior Art Database

Abstract

Disclosed is a method for high-density plasma (HDP) v-springs. Benefits include improved performance, improved productivity, and improved cost effectiveness.

This text was extracted from a Microsoft Word document.
This is the abbreviated version, containing approximately 79% of the total text.

Method for HDP v-springs

Disclosed is a method for high-density plasma (HDP) v-springs. Benefits include improved performance, improved productivity, and improved cost effectiveness.

Background

      Nickel corrodes less than stainless steel in an HDP environment. Parts of process tools that are made of high nickel alloy corrode less than the stainless steel parts. Other metals exhibit resistance to corrosion in this process environment, such as titanium and chrome alloys, are equally useful but are more expensive.

      Excess particles in the HDP chamber and corrosion of the parts result in frequent maintenance cycles. The conventional material (stainless steel) corrodes in the process environment, leading to excessive replacement. With the use of corrosion resistant metals, the replacement rate is less frequent and the impact on the process less severe.

              Conventionally, stainless steel plate springs and the gate valve assembly that accompanies it is frequently replaced.

Description

      The disclosed method is the use of high nickel alloys, titanium, and titanium alloys in the manufacturing of v-springs in the gate valve assembly for 300-mm HDP equipment. No changes are made to the physical dimensions of the part.

      The disclosed method can be made through molding, stamping or pressing, by those skilled in the art of flat-spring manufacturing.

      A corrosion resistant, light weight metal produces fewer particles during the high d...