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EUV Beam Transit System Design Disclosure Number: IPCOM000032429D
Publication Date: 2004-Nov-04
Document File: 1 page(s) / 244K

Publishing Venue

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Related People

Cymer, Inc.: OWNER


Purpose and advantage of invention: This invention provides a means by which to deliver 2 parallel path laser beams.

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Title: Universal, User friendly vacuum flange

Purpose and advantage of invention:

Eliminates the need to choose threaded vs thru-hole during design phase

Reduces man-power and assembly time

Eliminates drilling of flanges and issues with debris and contamination

Short description of invention (Include or attach appropriate sketches, and point out novel features):


The “user-friendly” flange incorporates hole patterns with both threaded and thru-hole patterns.

The sealing nature of the flange is dependent upon the ring having some appropriate stiffness to ensure uniform deformation of the copper vacuum gasket. Increasing the number of thru-holes reduces the stiffness of the ring. This necessitates either an increase in flange outer diameter, flange thickness, or a combination of the two.