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Light source configuration with optimized photon utilization

IP.com Disclosure Number: IPCOM000033215D
Publication Date: 2004-Dec-01
Document File: 2 page(s) / 29K

Publishing Venue

The IP.com Prior Art Database

Abstract

The proposed light source layout optimizes the utilization of light emitted from a substantially transparent light source (e.g. arc lamp). The light emitted from the light source is directed to the exit point of the system via several paths.

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Light source configuration with optimized photon utilization

Martin Ebert

Therma-Wave, Inc. 1250 Reliance Way, Fremont, CA 94539, USA

Abstract: The proposed light source layout optimizes the utilization of light emitted from a substantially transparent light source (e.g. arc lamp). The light emitted from the light source is directed to the exit point of the system via several paths.

Docket #: TWI-28600 Original date: October 1, 2004

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Light source configuration with optimized photon utilization

Martin Ebert

Therma-Wave, Inc. 1250 Reliance Way, Fremont, CA 94539, USA

The proposed light source layout optimizes the utilization of light emitted from a substantially transparent light source (e.g. arc lamp). The light emitted from the light source is directed to the exit point of the system (in figure 1 marked by the interface to an optical fiber) via several paths:

1) Light directly from the source emitted in the direction of the exit point.
2) Light from the source emitted in the principle direction of the exit point but outside the actual opening after reflection off the spherical mirror and subsequently the elliptical mirror.
3) Light from the source emitted in a direction away from Exit point after reflection off the elliptical mirror.

When using this configuration with optical fibers, or in other cases in which the usable numerical aperture is limited, a spherical mirror, reducing the imaging quality of the system slightly, but reducing the cost of th...