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DISPERSION OF Pd METAL ON CERAMIC POWDER SURFACES FOR ENHANCED BINDER BURN-OFF

IP.com Disclosure Number: IPCOM000034228D
Original Publication Date: 1989-Jan-01
Included in the Prior Art Database: 2005-Jan-27
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

David, LD: AUTHOR

Abstract

The coating of Pd metal on the surfaces of ceramic powders used to produce green sheets for semiconductor devices will improve binder burn-off (BBO) in oxidizing atmospheres. In the production of ceramic substrates it is desirable to reduce carbonaceous residue resulting from a sintering step. In this development, Pd compounds (all of oxidation state +2 for Pd) are milled with the ceramic powder in hexamethyldisilazane. This places Me3SiO- groups on the ceramic surface replacing -OH groups and disperses Pd over the surfaces in minute islands. The powder is dried and cast with a resin and a plasticizer in a conventional multilayer ceramic (MLC) sheet casting process. After a calcination step, in which the sheets are placed in an air furnace for 8 hours at 300oC, the carbon residue is N250 ppm.

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DISPERSION OF Pd METAL ON CERAMIC POWDER SURFACES FOR ENHANCED BINDER BURN-OFF

The coating of Pd metal on the surfaces of ceramic powders used to produce green sheets for semiconductor devices will improve binder burn-off (BBO) in oxidizing atmospheres. In the production of ceramic substrates it is desirable to reduce carbonaceous residue resulting from a sintering step. In this development, Pd compounds (all of oxidation state +2 for Pd) are milled with the ceramic powder in hexamethyldisilazane. This places Me3SiO- groups on the ceramic surface replacing -OH groups and disperses Pd over the surfaces in minute islands. The powder is dried and cast with a resin and a plasticizer in a conventional multilayer ceramic (MLC) sheet casting process. After a calcination step, in which the sheets are placed in an air furnace for 8 hours at 300oC, the carbon residue is N250 ppm. Green sheets without the benefit of the Pd catalytic effect at 300oC in air will have a residue of N3000 ppm carbon after 8 hours. Reference U.S. Patent 4,474,731.

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