Browse Prior Art Database

Table Lockdown System

IP.com Disclosure Number: IPCOM000034318D
Original Publication Date: 1989-Feb-01
Included in the Prior Art Database: 2005-Jan-27
Document File: 2 page(s) / 76K

Publishing Venue

IBM

Related People

Gasper, A: AUTHOR [+4]

Abstract

This article describes a table lockdown mechanism which locks an air suspension table in an accurate and rigid position to allow a successful wafer transfer between a wafer handler and inspection equipment on top of the air suspension table. (Image Omitted) In a wafer manufacturing process, machines which do measurements or inspection on features of microscopic size usually have an air suspension table top to prevent ground vibrations to be transmitted to the measuring equipment. Measurements in the microns and submicron range are taken on the surface of the wafers, and any vibrations with amplitude in this range would cause errors.

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Table Lockdown System

This article describes a table lockdown mechanism which locks an air suspension table in an accurate and rigid position to allow a successful wafer transfer between a wafer handler and inspection equipment on top of the air suspension table.

(Image Omitted)

In a wafer manufacturing process, machines which do measurements or inspection on features of microscopic size usually have an air suspension table top to prevent ground vibrations to be transmitted to the measuring equipment. Measurements in the microns and submicron range are taken on the surface of the wafers, and any vibrations with amplitude in this range would cause errors. To automate these machines it is necessary to lock the floating table down to an accurate position during a change of wafers in order to interface the automatic wafer handler to the inspection equipment on top of the floating table. A wafer cannot be passed back and forth from the wafer handler to the floating table while the table is floating because the floating height is not stable. Fig. 1 is a side view and Fig. 2 is a top view of a typical machine which is used in the wafer inspection process. The machine basically consists of a base 1, a heavy table top 2, an inspection/ measurements assembly 3 and an automatic wafer handler
4. The base rests on the floor and the wafer handler is bolted solid to the base. The inspection/measurements equipment is bolted solid to the table top, and the table top is suspended...