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Patterning of High Temperature Superconducting Thin Films

IP.com Disclosure Number: IPCOM000034379D
Original Publication Date: 1989-Feb-01
Included in the Prior Art Database: 2005-Jan-27
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Gupta, A: AUTHOR [+3]

Abstract

Patterns of high temperature superconducting oxide films can be produced by laser irradiation. A solution is made of the nitrates of the components of the superconducting film, and the solution is sprayed onto a substrate. For example, if a patterned layer of YBa2Cu3O7-x is desired, the nitrates could be Y(NO3)3, Ba(NO3)2, and Cu(NO3)2 . These precursors are dissolved in water, and the solution is sprayed onto the substrate, where it is dried to leave a precursor layer. The precursor layer is then irradiated with a laser beam (CO2, Ar ion, excimer laser, etc.) at those areas whose insulation is desired. For a focussed Ar ion laser operating at 514 nm, a power of 1 W can be used. Annealing in an oven in flowing oxygen will yield insulating lines in the irradiated areas and superconducting lines in the non-irradiated areas.

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Patterning of High Temperature Superconducting Thin Films

Patterns of high temperature superconducting oxide films can be produced by laser irradiation. A solution is made of the nitrates of the components of the superconducting film, and the solution is sprayed onto a substrate. For example, if a patterned layer of YBa2Cu3O7-x is desired, the nitrates could be Y(NO3)3, Ba(NO3)2, and Cu(NO3)2 . These precursors are dissolved in water, and the solution is sprayed onto the substrate, where it is dried to leave a precursor layer. The precursor layer is then irradiated with a laser beam (CO2, Ar ion, excimer laser, etc.) at those areas whose insulation is desired. For a focussed Ar ion laser operating at 514 nm, a power of 1 W can be used. Annealing in an oven in flowing oxygen will yield insulating lines in the irradiated areas and superconducting lines in the non-irradiated areas. The insulating lines of Y-Ba- Cu-O have resistivity of about 500 ohm-cm at 100K. The laser wavelengths are chosen to be absorbed by either the substrate (10.6 micrometers CO2 laser radiation is absorbed by MgO) or by the film (various Ar ion lasers and UV wavelengths can be used).

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