Browse Prior Art Database

Atmospheric Pressure Plasma Pen Driven by a Surfatron

IP.com Disclosure Number: IPCOM000034383D
Original Publication Date: 1989-Feb-01
Included in the Prior Art Database: 2005-Jan-27
Document File: 2 page(s) / 26K

Publishing Venue

IBM

Related People

Heidenreich, J: AUTHOR [+4]

Abstract

This plasma pen allows the formation of an intense plasma which does not require a reference ground as compared to a DC or RF plasma torch. A plasma jet, which is typically formed using gases, such as argon, nitrogen and/or oxygen, can be made to have submillimeter dimensions. This plasma pen can then be moved across a polymer-coated substrate. The polymer will be removed at rates of approximately 25 microns/minute, under conditions of 200 W microwave power with about 2 l/min. argon. This allows the selective removal of polymer debris by operators or robotic systems and avoids the requirement of using vacuum systems to create plasmas (no pumpdown or pumps are required). In operation, the plasma may be refracted by simply reducing the incident power, thus allowing the substrate to be moved to a suitable location.

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Atmospheric Pressure Plasma Pen Driven by a Surfatron

This plasma pen allows the formation of an intense plasma which does not require a reference ground as compared to a DC or RF plasma torch. A plasma jet, which is typically formed using gases, such as argon, nitrogen and/or oxygen, can be made to have submillimeter dimensions. This plasma pen can then be moved across a polymer-coated substrate. The polymer will be removed at rates of approximately 25 microns/minute, under conditions of 200 W microwave power with about 2 l/min. argon. This allows the selective removal of polymer debris by operators or robotic systems and avoids the requirement of using vacuum systems to create plasmas (no pumpdown or pumps are required). In operation, the plasma may be refracted by simply reducing the incident power, thus allowing the substrate to be moved to a suitable location. In turn, this means that the plasma does not have to be re-ignited and the system re-tuned.

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