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Transport Mechanism for Boron Tribromide Bubblers

IP.com Disclosure Number: IPCOM000034933D
Original Publication Date: 1989-May-01
Included in the Prior Art Database: 2005-Jan-27
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Gallant, CR: AUTHOR [+2]

Abstract

A transport mechanism is shown that provides containment facilities when handling boron tribromide (BBR3) bubbler vessels. These vessels containing BBR3 are used in diffusion furnaces for base semiconductor processes and pose a safety hazard if broken while being handled and moved from place to place. Boron tribromide, when exposed to moisture in the air or when in contact with a hygroscopic material, forms a dangerous gas (hydrogen bromide) which is a safety hazard in the work place. Vermiculite was thought to be useful and was the material of choice for containment in the past. New OSHA regulations, however, require the suppliers of vermiculite to add moisture due to the asbestos content. In addition, vermiculite is hygroscopic and will absorb atmospheric moisture.

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Transport Mechanism for Boron Tribromide Bubblers

A transport mechanism is shown that provides containment facilities when handling boron tribromide (BBR3) bubbler vessels. These vessels containing BBR3 are used in diffusion furnaces for base semiconductor processes and pose a safety hazard if broken while being handled and moved from place to place. Boron tribromide, when exposed to moisture in the air or when in contact with a hygroscopic material, forms a dangerous gas (hydrogen bromide) which is a safety hazard in the work place. Vermiculite was thought to be useful and was the material of choice for containment in the past. New OSHA regulations, however, require the suppliers of vermiculite to add moisture due to the asbestos content. In addition, vermiculite is hygroscopic and will absorb atmospheric moisture. Now silica sand is the material of choice for containment purposes because it is dry and not hygroscopic. A transport cart providing safe temporary containment in the event of an accidental chemical spill is shown in the figure. The bubbler containment portion of the transport 10 is constructed of inert and non-reactive material, i.e., PVC, and is mounted on a modified aluminum cart 11. The maximum height of the bubbler containment section is such that no interference occurs when the bubbler vessels 12 are transferred from the transport cart to the tool gas cabinet and vice versa. The bottom of the containment section is covered with approximately 1/2...