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Concurrent Display of Four SEM Images Using Four Adjacent Pixels Per Sample Point

IP.com Disclosure Number: IPCOM000035010D
Original Publication Date: 1989-May-01
Included in the Prior Art Database: 2005-Jan-28
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Abe, H: AUTHOR

Abstract

This article describes a technique for concurrently displaying four different SEM (Scanning Electron Microscope) images on a CRT display. Four adjacent pixels are used to display four types of information detected at each of SEM sample points so that the four different SEM images are displayed in an intermingled manner on the same display screen. When a number of SEM images are concurrently displayed for comparison, the so-called screen partitioning method or image superimposing method has been used heretofore. However, these methods involve the problems that in the former the SEM images become small and in the latter the SEM images interfere with each other, making close image analysis difficult. The present method is illustrated in the figure.

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Concurrent Display of Four SEM Images Using Four Adjacent Pixels Per Sample Point

This article describes a technique for concurrently displaying four different SEM (Scanning Electron Microscope) images on a CRT display. Four adjacent pixels are used to display four types of information detected at each of SEM sample points so that the four different SEM images are displayed in an intermingled manner on the same display screen. When a number of SEM images are concurrently displayed for comparison, the so-called screen partitioning method or image superimposing method has been used heretofore. However, these methods involve the problems that in the former the SEM images become small and in the latter the SEM images interfere with each other, making close image analysis difficult. The present method is illustrated in the figure. Four different types of information, for example, secondary electron image SEI, backscattered electron image BEI, X-ray image 1 and X-ray image 2 which represent various surface characteristics of the object under inspection, are detected by scanning of the electron beam. These analog signals are converted to digital signals by the high-speed A/D converter and stored in the disk memory of the computer. The computer reads the digital signals from the disk memory, performs coloring as a function of signal intensity and writes the processed digital signals in the display memory of the monitor. The SEM data are stored in the display memory so th...