Browse Prior Art Database

Lightweight X-Y Positioning Table

IP.com Disclosure Number: IPCOM000035020D
Original Publication Date: 1989-May-01
Included in the Prior Art Database: 2005-Jan-28
Document File: 2 page(s) / 84K

Publishing Venue

IBM

Related People

Clothier, RW: AUTHOR [+3]

Abstract

An X-Y positioning table can be constructed of lightweight materials and the two stages nested to provide a more compact unit for faster traverse and exposure of both top and bottom surfaces of the supported workpiece. Referring to the figures, X-stage 1 is driven by linear magnetic motors 2, 3 in either direction along one axis, indicated by the double arrow A. The X-stage is supported on air bearings 4 and confined within a pair of parallel side channels 5 (Fig. 3) mounted on base 6. The X-stage 1 has a central opening 7. (Image Omitted) A Y-stage is supported on air bearings 8 on both X-stage 1 and base 6 and driven by linear magnetic motors 9 and 10 laterally between side channels 5.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 2

Lightweight X-Y Positioning Table

An X-Y positioning table can be constructed of lightweight materials and the two stages nested to provide a more compact unit for faster traverse and exposure of both top and bottom surfaces of the supported workpiece. Referring to the figures, X-stage 1 is driven by linear magnetic motors 2, 3 in either direction along one axis, indicated by the double arrow A. The X-stage is supported on air bearings 4 and confined within a pair of parallel side channels 5 (Fig. 3) mounted on base 6. The X-stage 1 has a central opening 7.

(Image Omitted)

A Y-stage is supported on air bearings 8 on both X-stage 1 and base 6 and driven by linear magnetic motors 9 and 10 laterally between side channels 5. The Y-stage surrounds the X-stage and also has a central 11 in which a workpiece can be positioned to permit access to both the upper and lower surfaces. Granite base 6 is relatively long, permitting extensive travel X-stage movement while Y-stage motion is limited by the side channels 5. All structures are constructed of plastic honeycomb graphite composite material with thin granite skins bonded to the honeycomb material to act as air-bearing surfaces. This technique reduces the weight to enable faster table motion.

1

Page 2 of 2

2

[This page contains 6 pictures or other non-text objects]