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Dressing Disk for Fixed Abrasive Polishing Material

IP.com Disclosure Number: IPCOM000035095D
Original Publication Date: 1989-Jun-01
Included in the Prior Art Database: 2005-Jan-28
Document File: 2 page(s) / 53K

Publishing Venue

IBM

Related People

Fox, DL: AUTHOR [+6]

Abstract

The dressing disk 5 in Figs. 1 and 2 has several design parameters in order to restore fixed abrasive polishing materials back to their original state. In Fig. 1, the dressing disk is made of a base metal of aluminum 1. This base metal exactly duplicates the physical parameters of the substrate being polished except for the thickness. The thickness usually has to be 100-250 mils thick to maintain perfect flatness. The base metal surface 2 must first be conditioned before the dressing material can be applied. This can be accomplished in two manners -- grinding or sand blasting the surface to a roughness in the 200 microinches AA region. This step is necessary to improve the adhesion characteristics of the dressing material.

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Dressing Disk for Fixed Abrasive Polishing Material

The dressing disk 5 in Figs. 1 and 2 has several design parameters in order to restore fixed abrasive polishing materials back to their original state. In Fig. 1, the dressing disk is made of a base metal of aluminum 1. This base metal exactly duplicates the physical parameters of the substrate being polished except for the thickness. The thickness usually has to be 100-250 mils thick to maintain perfect flatness. The base metal surface 2 must first be conditioned before the dressing material can be applied. This can be accomplished in two manners -- grinding or sand blasting the surface to a roughness in the 200 microinches AA region. This step is necessary to improve the adhesion characteristics of the dressing material.

The dressing material 3 consists of a matrix of tungsten carbide (WC) and cobalt (Co). The application of the material is by plasma flame spraying. The coating is applied using nonstandard procedure parameters to achieve the desired surface topography. The main variance from the norm is in the particle velocity. This is essential in order to obtain longer particle dwell time in the flame. The advantage of such technique is the ability to obtain the desired surface finishes for proper dressing of the fixed abrasive polishing material. The surface roughness after this step is in the 150 microinches AA region.

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The plasma flame sprayed material consists of a 88%WC-12%Co matrix. The sig...