Browse Prior Art Database

E-Beam Testing With an On-Chip Spectrometer

IP.com Disclosure Number: IPCOM000035646D
Original Publication Date: 1989-Jul-01
Included in the Prior Art Database: 2005-Jan-28
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Pastol, Y: AUTHOR [+2]

Abstract

An on-chip secondary electron energy spectrometer is described. When used in the Picosecond Photoelectron Scanning Electron Microscope (PPSEM) [1] this spectrometer permits non-contact waveform measurements on wafers and unpackaged chips with a picosecond time resolution.

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E-Beam Testing With an On-Chip Spectrometer

An on-chip secondary electron energy spectrometer is described. When used in the Picosecond Photoelectron Scanning Electron Microscope (PPSEM)
[1] this spectrometer permits non-contact waveform measurements on wafers and unpackaged chips with a picosecond time resolution.

For quantitative electron beam testing, one must use a spectrometer with extraction and analyzing grids [2]. The extraction grid must be close to the device under test (DUT) so as to "flatten" the microfields. Geometrically, it is difficult to fit such a spectrometer into the small hole of a probe card. Another difficulty of electron beam testing is the transit time effect (TTE) by which the secondary electrons leaving the DUT are influenced by the time varying fields near the probed electrode. Ordinarily, one reduces the influence of the TTE by applying a high extraction field above the DUT. Using this method, the time resolution of the PPSEM has been lowered down to 5 ps with a field strength of 2 kV/mm [1]. However, this improvement levels off for higher extracting fields.

In order to solve the above problems, it is proposed to replace the energy analyzer of the E-beam tester by an on-chip energy analyzer of similar structure. This on-chip spectrometer consists of successive layers of dielectric and metallization reproducing the planar retarding- field energy analyzer configuration. Using standard lithographic techniques, each layer is patterned with the...