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Improved Electrostatic Deflection Assembly for Low-Voltage Microscopy

IP.com Disclosure Number: IPCOM000035833D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28
Document File: 2 page(s) / 59K

Publishing Venue

IBM

Related People

Lavallee, KA: AUTHOR

Abstract

A electrostatic deflection assembly for low-voltage microscopy is shown which is made up of fewer parts, is easier to produce and assemble and enhances maintainability.

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Improved Electrostatic Deflection Assembly for Low-Voltage Microscopy

A electrostatic deflection assembly for low-voltage microscopy is shown which is made up of fewer parts, is easier to produce and assemble and enhances maintainability.

Through design simplification, an electrostatic deflection assembly for a low- voltage microscope has been reduced from 20 part numbers to 7. Only 6 pieces are required to be cleaned periodically as compared with 36 pieces in an existing unit. Also, the design simplicity is better suited for vacuum environments.

A housing for the electrostatic deflection assembly is made from solid stainless steel stock as shown in the figure. A bore is drilled through the length of the cylinder and O-ring grooves are cut on each end for vacuum sealing. Flats and windows for the deflection plates, eight holes for mounting stigmator coils and the X and Y deflection plates are formed on a milling machine.

The four deflection plates are electrically isolated from the housing by utilizing TEFLON* insulators placed on both sides of the plates. The O-ring groove depth is designed to allow for 20 to 30% compression while maintaining about .5 mm of space between the plates and housing as allowed by the insulator. * Trademark of E. I. du Pont de Nemours & Co.

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