Browse Prior Art Database

Process to Form a Moveable Micromachine Hinge

IP.com Disclosure Number: IPCOM000035843D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28
Document File: 2 page(s) / 55K

Publishing Venue

IBM

Related People

Battaline, R: AUTHOR [+2]

Abstract

A critical requirement of micromachines is the ability to move in a controlled way. A process sequence is shown for fabricating a hinge which allows a full range of rotary motion.

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Process to Form a Moveable Micromachine Hinge

A critical requirement of micromachines is the ability to move in a controlled way. A process sequence is shown for fabricating a hinge which allows a full range of rotary motion.

The micromachine hinge is shown in Fig. 1 with an axle which is free to move being supported by two fixed bearings. Referring to Fig. 2, the axle shaft and bearing structure is fabricated from three levels of metal, M1, M2 and M3. The axle shaft, fabricated in the second level metal (M2), is hinged into the shaft bearings fabricated from first, second and third level metals. The hinged axle shaft, which is attached to the hinge plate, extends out of the bearing enclosures to become the moveable element.

The method for forming the hinge, shown in Fig. 2 cross-section, starts with a trough 1 cut into the substrate 2. A CVD refractory metal 3 is deposited and polished back. Next paralyene 4 is deposited and polished back. This fills the space in the hinge structure. Next metal 2 is deposited and defined. Oxide 5 is deposited and polished back to be coplanar with the M2 metal. A mask is used to remove the oxide over the metal 2 shapes, which is subsequently replaced with paralyene 6 which is deposited and planarized back. Next a final layer of paralyene 7 is deposited over the planar surface and defined with holes (troughs) S2 in the insulator. Finally, metal 3 is deposited and defined. The metal 3 fills the troughs S2 and subsequently all of th...