Browse Prior Art Database

Pellicle Placement System

IP.com Disclosure Number: IPCOM000035845D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Johnson, A: AUTHOR [+4]

Abstract

A system for placing pellicles on masks is installed in a cleaning line such that cleaned masks are quickly covered by freshly cleaned pellicles. The placement system is bathed in a downward flow of clean air and all moving parts are constructed of materials selected for low particle generation.

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Pellicle Placement System

A system for placing pellicles on masks is installed in a cleaning line such that cleaned masks are quickly covered by freshly cleaned pellicles. The placement system is bathed in a downward flow of clean air and all moving parts are constructed of materials selected for low particle generation.

The figure is a plan view of the pellicle-to-mask placement system. A first cleaning facility supplies freshly cleaned pellicles P to the left side of the placement system. A second cleaning facility within the same clean room environment supplies cleaned masks M at the right side of the system. Cleaning facilities and the placement system are subjected to a continuous downward flow of very clean air.

The placement system has a "T"-shaped mounting structure 2 which is open through its interior to permit free flow of air downward. Two hemispherical assemblies 4a and 4b, have mounted thereon vacuum attached mounting plates 6a and 6b to which pellicles 8a and 8b can be attached. The assemblies are shown in the pellicle mounting position by dashed lines and the holding position by solid lines. Not shown are means for moving the parts 4, 6, and 8 which are attached to mechanical rotation and linear translation elements driven by stepping motors. All of the moving parts are of standard design but are made of materials which are wear resistant and minimize generation of particles and are placed below the pellicle position where possible. Mask holder 10...