Browse Prior Art Database

High-Speed Stereo Electron Beam Micro Photogrammetry Measurements

IP.com Disclosure Number: IPCOM000035885D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28
Document File: 2 page(s) / 48K

Publishing Venue

IBM

Related People

Lukianoff, G: AUTHOR

Abstract

The present technique provides a system for performing stereo and stereo micro-photogrammetry measurements. Scanning electron beam instruments are used, with attachments for stereo data processing, beam alignment, and tilt correction.

This text was extracted from a PDF file.
At least one non-text object (such as an image or picture) has been suppressed.
This is the abbreviated version, containing approximately 83% of the total text.

Page 1 of 2

High-Speed Stereo Electron Beam Micro Photogrammetry Measurements

The present technique provides a system for performing stereo and stereo micro-photogrammetry measurements. Scanning electron beam instruments are used, with attachments for stereo data processing, beam alignment, and tilt correction.

Electron beams 1 and 2 (forming one set) are at a fixed angular position 3 to each other and move (4) over the stationary specimen 5,

(Image Omitted)

to measure electrical performance and physical features of the specimen 5. Each set of electron beams can perform three-dimensional stereo microscopy at slow or TV rates. At both rates it is possible to simultaneously observe events or features from two different directions.

Another application of the technique is in height or depression measurements, by using two sets of electron beams in stereo arrangement. Two sets of electron beams are put into line-scanning mode and scan (6) along the same parallel planes 7. The scan lines are to pass over the center of the pad 8 and measure the maximum height. Two line-scanning signals result, one from each set of electron beams. The difference in scanning signals provides two angular inclinations, or directions of viewing, associated with the angular separation of the electron beam columns 9. The two line-scanning signals are maximized by software, as shown in the Fig. 3 block diagram. The result is precise measurement of specimen height (or depression).

The advantages and novelty...