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Producing an Alloy Target

IP.com Disclosure Number: IPCOM000036008D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28
Document File: 2 page(s) / 56K

Publishing Venue

IBM

Related People

Brunsch, A: AUTHOR [+2]

Abstract

Sputter targets, as are used in particular for the storage film of magneto-optical layers, contain as main constituents an alloy of rare earths and transition metals. Such alloys have the disadvantage that they are extremely brittle and hard, so that they are very difficult to produce with large dimensions by standard methods. This article describes a method of producing amorphous and homogeneous alloys.

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Producing an Alloy Target

Sputter targets, as are used in particular for the storage film of magneto- optical layers, contain as main constituents an alloy of rare earths and transition metals. Such alloys have the disadvantage that they are extremely brittle and hard, so that they are very difficult to produce with large dimensions by standard methods. This article describes a method of producing amorphous and homogeneous alloys.

It has been known for some time that particular metal alloys can be produced in an amorphous state by extremely fast cooling. Such alloys generally consist of a transition metal and an atom with a smaller radius. Particularly favorable are alloys of the composition A80B20, where A is a transition metal, such as Fe, Co, Ni, and B is a non-metal with a smaller radius, such as B, Ge, As.

It has been found that stable alloys of the composition A80B20 may also be produced in the amorphous state, if A stands for Fe, Co and Ni, whereas B stands for one of the larger rare earths. These alloys can also be produced in the form of thin amorphous storage bands. For this purpose, the alloy is melted and sprayed in a liquid state onto a cooled copper surface, so that extremely high cooling rates (106o C/s) are obtained. Compared with crystalline materials, such bands are flexible and homogeneous, i.e., they can be bent to any shape.

In one application, amorphous bands thus produced, are processed in the form of targets. For this purpose, the thin bands are stacked depending upon the shape of the target required. If, for example, a rectangular target is to be produced, band portions in the desired length are cu...