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Vertically Emitting Laser With Integrated Non-Absorbing Mirror Deflector

IP.com Disclosure Number: IPCOM000036064D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-28
Document File: 2 page(s) / 54K

Publishing Venue

IBM

Related People

Buchmann, P: AUTHOR [+4]

Abstract

The proposed device is a planar diode laser using etched beam deflectors which provide an output beam perpendicular to the wafer surface. Both deflectors and mirrors are non-absorbing, whereby the device can be operated at very high output power without mirror or deflector damage. The planar mirror surface allows the use of planar coating processes for additional mirror reflectivity modification.

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Vertically Emitting Laser With Integrated Non-Absorbing Mirror Deflector

The proposed device is a planar diode laser using etched beam deflectors which provide an output beam perpendicular to the wafer surface. Both deflectors and mirrors are non-absorbing, whereby the device can be operated at very high output power without mirror or deflector damage. The planar mirror surface allows the use of planar coating processes for additional mirror reflectivity modification.

Fig. 1 shows a cross-section through the laser with the optical axis of the Fabry-Perot (FP) resonator laying in the plane of the drawing. The structure is formed by a layer sequence 1 to 5 deposited on a substrate 8 and contacted by top and bottom ohmic contacts 6 and 7. Layers 2 and 5 are cladding layers, 4 is the active layer, 3 forms the waveguide structure, and 1 is a contact layer. At both ends of the laser diode, deflector grooves have been etched into the wafer using, e.g., RIBE etching techniques. The groove surfaces form a 45 angle with the wafer surface and deflect the output beam vertically. The non-absorbing mirrors (NAMs) of the FP resonator are formed by the air/coating/cladding layer
(2) interface. The planar mirrors are non-absorbing because the contact layer 1 has been removed and the cladding layer 2 (as well as 5) has a higher bandgap than the light- generating active layer 4.

(Image Omitted)

In order to create a non-absorbing deflector surface, the active layer 4 is made of quan...