Browse Prior Art Database

Wafer-Inspection Machine

IP.com Disclosure Number: IPCOM000036355D
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-28
Document File: 3 page(s) / 42K

Publishing Venue

IBM

Related People

Chan, SA: AUTHOR [+6]

Abstract

This article describes a machine for the visual inspection of defects on wafers which were detected by other machines in the wafer-manufacturing process. The machine is automated to eliminate an operator contacting the wafer.

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Wafer-Inspection Machine

This article describes a machine for the visual inspection of defects on wafers which were detected by other machines in the wafer-manufacturing process. The machine is automated to eliminate an operator contacting the wafer.

Referring to the drawings, Fig. 1 is a plan view, and Fig. 2 is a right-side view of the machine. Fig. 3 shows the electrical controls enclosure. The automatic wafer handler 1 is the input/output to the machine. The operator loads a cassette 2 with wafers to be processed, and the machine takes care of the handling, processing, and sorting of the inspected wafers. The wafer-handler electronics and pneumatics are packaged in the area 3. The left-side section of the machine supports the wafer-handling tasks.

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The wafer handler 1 has three cassette elevators 5, an orientor 6, a center handler 11, and a propeller 7. The elevators 5 raise or lower the wafer cassette to make each wafer randomly accessible to the center handler 11. The center handler 11 is located in the center of the wafer handler and rotates, and extends radially outward to the surrounding units to transfer the wafers. The X, Y, and angular position of the wafer is roughly oriented in the orientor 6 before it is passed on to the propeller 7. The propeller 7 then moves the wafer and places it on the chuck when the chuck is at home position. All the functions of the wafer handler are computer controlled by a machine tool control computer.

(Image Omitted)

A translation X/Y stage 14 automatically positions the wafer to be inspected under an inspection microscope 8. Various positions coming from a host computer are received by the tool computer, and the translation stage will go to the defined points for the operator to inspect. When the inspection is comp...