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Double-Sided Electrostatic Chuck

IP.com Disclosure Number: IPCOM000036653D
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29
Document File: 2 page(s) / 69K

Publishing Venue

IBM

Related People

Kendall, RA: AUTHOR

Abstract

The electrostatic chuck described in this article can be easily installed or removed from a piece of equipment operating in a high vacuum system environment without venting the system. The chuck assembly requires no external wiring, has no moving parts, and utilizes the same mechanism that is employed to load and unload substrates, e.g., masks or wafers, thereby facilitating easy inspection and cleaning to prevent contamination build-up.

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Double-Sided Electrostatic Chuck

The electrostatic chuck described in this article can be easily installed or removed from a piece of equipment operating in a high vacuum system environment without venting the system. The chuck assembly requires no external wiring, has no moving parts, and utilizes the same mechanism that is employed to load and unload substrates, e.g., masks or wafers, thereby facilitating easy inspection and cleaning to prevent contamination build-up.

Electrostatic chucks are ordinarily "single-sided" and fastened into process equipments using conventional means, that is, screws, clamps, etc., as in Fig 1. In Fig. 1, a chuck 1 is fastened, as shown, to the process equipment 2, by hold- down screws 3. Essential elements of the this double-sided chuck are illustrated in Fig. 2, in which two chucks 9 and 10 are shown placed back to back with a ground plane 17 between them. The dielectric layer 12 and electrode 13 form one chuck 9, which secures the substrate 11 to the chuck 9, and the dielectric layer 15 and electrode 16 form the other chuck 10, which

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secures the entire assembly to the piece of equipment in which it is being used. The two chucks 9 and 10 are separated by the ground plane or guard layer 17 which prevents fields generated by one of the electrodes from protruding into the region of the other electrode. Referring to Fig. 3, the double-sided, electrostatic chuck assembly 31 is so designed that when inserted into a high...