Browse Prior Art Database

Sealing System for Silicon Carbide Rods

IP.com Disclosure Number: IPCOM000036722D
Original Publication Date: 1989-Oct-01
Included in the Prior Art Database: 2005-Jan-29
Document File: 2 page(s) / 47K

Publishing Venue

IBM

Related People

Perinet, JB: AUTHOR

Abstract

The present disclosure aims to improve sealing between the cantilever or quartz door and the rod to avoid HCl or dopant (BBr3) leakage during high temperature steps, such as diffusion/oxidation in the standard semiconductor manufacturing process.

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Sealing System for Silicon Carbide Rods

The present disclosure aims to improve sealing between the cantilever or quartz door and the rod to avoid HCl or dopant (BBr3) leakage during high temperature steps, such as diffusion/oxidation in the standard semiconductor manufacturing process.

Usually, the rod made of silicon carbide exhibits some defects, such as a poor surface state and low dimension tolerance, which makes a real seal difficult to obtain.

As shown in the drawing, the addition of two toroidal joints in VITON* suffices to prevent any leakage during the thermal process. * Trademark of E. I. du Pont de Nemours & Co.

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