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Thermal Conductivity Measurement of THIN Films

IP.com Disclosure Number: IPCOM000037127D
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Shieh, HD: AUTHOR

Abstract

Described is a method to measure the thermal conductivity of thin films using a magneto-optical (MO) thin film with a known Curie temperature as a sensor. The thermal conductivity of a thin film can be derived by iterating thermal profile calculations using parameters obtained by locally laser heating a MO/THIN FILM sample up to Curie temperature.

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Thermal Conductivity Measurement of THIN Films

Described is a method to measure the thermal conductivity of thin films using a magneto-optical (MO) thin film with a known Curie temperature as a sensor. The thermal conductivity of a thin film can be derived by iterating thermal profile calculations using parameters obtained by locally laser heating a MO/THIN FILM sample up to Curie temperature.

Magnetic thin films have a well-defined Curie temperature, which is a function of composition [1]. The Curie temperature can be obtained by measuring the disappearance of magnetic moment. In rare earth-transition metal thin films, the magneto-optical signal (Kerr or Faraday signal) disappears at the Curie temperature [2].

By varying laser power amplitude or duration of laser pulses, the temperature of a locally heated area (1-2 micrometers in diameter) on a MO thin film with a known thickness can be raised to the Curie temperature which can be detected magnetooptically. With the obtained writing parameters of laser power, pulse duration and other known parameters such as reflectivity, the peak temperature of a heated area (Curie temperature in this case), laser beam size, the thermal diffusivity and thermal profiles of the heated area are thereby calculated. Such calculations can be conveniently done by using finite difference or finite element methods. With the given parameters, applying thermal conductivity as a parameter to iterate thermal profile until the temperature a...