Browse Prior Art Database

Miniature Glass Disc Polishing System

IP.com Disclosure Number: IPCOM000037132D
Original Publication Date: 1989-Nov-01
Included in the Prior Art Database: 2005-Jan-29
Document File: 2 page(s) / 44K

Publishing Venue

IBM

Related People

Coutu, P: AUTHOR

Abstract

A method is shown which allows real-time viewing of a top-down micropolishing process utilized for selective removal of various levels of a semiconductor chip for cross-sectional analysis. This method eliminates the need for interrupting the polishing process for the purpose of microscopically examining the specimen.

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Miniature Glass Disc Polishing System

A method is shown which allows real-time viewing of a top-down micropolishing process utilized for selective removal of various levels of a semiconductor chip for cross-sectional analysis. This method eliminates the need for interrupting the polishing process for the purpose of microscopically examining the specimen.

Chip analysis may require micropolishing into a 1 - 2-micron dimension of a specimen to inspect the cross-sectioned zone of interest. In the final phase of polishing, the process is frequently interrupted by the operator for microscopically inspecting the sample. When the specimen is returned to the polishing apparatus, the reinsertion of the sample results in a "high material" removal rate and occasionally the zone of interest is destroyed. A method is shown which will overcome this deficiency by allowing continuous monitoring of the sample during micropolishing.

Referring to the figure, micropolishing is accomplished by spinning a thin replaceable disc of slightly frosted glass 10 secured between two guides (top 11 and bottom 12) and belt driven 13 by a small variable speed motor 14. Adjustments along the Z-axis of the polishing plane are accomplished by moving platform 15 utilizing three micrometer-adjustable posts (not shown) separated by approximately 120 degrees. The posts move the entire assembly of glass disc, guides, motor and belt drive. A fourth post (not shown) is utilized as a belt guide and for belt...