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Laser Etching of Superconducting Oxide Films in Solution

IP.com Disclosure Number: IPCOM000037507D
Original Publication Date: 1989-Feb-01
Included in the Prior Art Database: 2005-Jan-29
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Gupta, A: AUTHOR [+2]

Abstract

High Tc superconducting oxide materials are quite reactive and lose their superconducting property easily in the presence of most solvents, particularly in an acidic medium. This makes it difficult to pattern these materials using standard photolithographic techniques. It is also known superconducting powder is placed in alkaline solution. A new process is disclosed for efficient etching of superconducting Y1Ba2Cu3O7-x films in a KOH solution with localized heating using a focused laser beam.

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Laser Etching of Superconducting Oxide Films in Solution

High Tc superconducting oxide materials are quite reactive and lose their superconducting property easily in the presence of most solvents, particularly in an acidic medium. This makes it difficult to pattern these materials using standard photolithographic techniques. It is also known superconducting powder is placed in alkaline solution. A new process is disclosed for efficient etching of superconducting Y1Ba2Cu3O7-x films in a KOH solution with localized heating using a focused laser beam.

Thin films of this superconductor were prepared on magnesium oxide and yttria stabilized zirconia substrates using a spray deposition technique. When these films were placed in 2-6 M KOH solution for 15 minutes no visible reaction was observed. However, electrical measurements done after removing the films from solution showed that the films were not superconducting and had a semiconducting behavior. After annealing in oxygen the superconducting properties can be restored. This suggests that the loss in superconductivity is probably related to removal of oxygen from the lattice and not due to irreversible reaction with the alkaline solution.

A focused argon ion laser beam at 514 nm is used to locally induce reaction of superconducting Y1Ba2Cu3O7-x films in 2-6 N KOH solution. The reaction was observed to be very localized and resulted in very efficient and clean etching. By scanning the substrate while illuminating wit...