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Photoresist Storage Unit with Fast Heat-Up Cycle

IP.com Disclosure Number: IPCOM000037542D
Original Publication Date: 1989-Mar-01
Included in the Prior Art Database: 2005-Jan-29
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Mueller, RP: AUTHOR [+2]

Abstract

This article discloses an apparatus for the storage and heating of photoresist material for semiconductor processing. For the longest storage shelf-life, it is desirable to keep photoresist material at cold temperatures, approximately 8oC. However, when in use, it is necessary to keep the photoresist at a warmer temperature, approximately 20oC to ensure adequate and reliable dispensing and lithographic properties.

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Photoresist Storage Unit with Fast Heat-Up Cycle

This article discloses an apparatus for the storage and heating of photoresist material for semiconductor processing. For the longest storage shelf-life, it is desirable to keep photoresist material at cold temperatures, approximately 8oC. However, when in use, it is necessary to keep the photoresist at a warmer temperature, approximately 20oC to ensure adequate and reliable dispensing and lithographic properties.

The apparatus 10 shown in the Figure maintains bulk photoresist 12 in container 14 at 8oC and provides for the rapid heating of the photoresist as needed. Cylindrical container 16, as part of its wall system, has peltier effect coolers 18. The current in the peltier coolers 18 is adjusted to keep liquid 20 at approximately 8oC. While the internal part of the container 16 is maintained at 8oC, the outer part of the peltier coolers 18 is substantially warmer.

Vessel 16 is concentrically mounted within an external vessel 22. Within the walls of container 22 are embedded additional peltier units 24 working in reverse of the first set of peltier coolers 18. In this way, the temperature of liquid 26 within vessel 22 can be maintained at the desired level, i.e., 20oC. In case of heavy need to warm up the liquid 26 within container 22, the peltier units 24 can be used. Conversely, if the temperature of liquid 26 is too high, then peltier units 24 can have their polarity reversed, and the liquid 26 cooled down.

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