Browse Prior Art Database

Multi-Station Load And Unload System

IP.com Disclosure Number: IPCOM000037677D
Original Publication Date: 1989-May-01
Included in the Prior Art Database: 2005-Jan-29
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Schick, HC: AUTHOR [+2]

Abstract

This article describes a multi-cassette loading and unloading unit (system unit) that is designed to provide wafer processing stations having single cassette capability with the capability to process a plurality of cassette, without human intervention.

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This is the abbreviated version, containing approximately 100% of the total text.

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Multi-Station Load And Unload System

This article describes a multi-cassette loading and unloading unit (system unit) that is designed to provide wafer processing stations having single cassette capability with the capability to process a plurality of cassette, without human intervention.

Referring to the figure, cassettes 2 are placed on system unit 1 in any of eight predefined positions (only four shown in figure for clarity). Mechanical cassette pick-up and positioner arm 3 seizes a cassette 2 and loads it onto supported wafer processing station (not shown). Positioner arm 3 will also seize cassette 2 and unload it from the wafer processing station and place it back on system unit 1 after processing is completed.

Control of positioner arm 3 is facilitated by an electronic interface 4 between the system unit 1 and the wafer processing station. System unit 1 is capable of being utilized with any wafer processing station that has only one cassette load/unload station.

Power is supplied to the system unit 1 through a standard external AC input 5 and through a DC input 6 from the wafer processing station. System unit 1 is supported by wheels 7 which allows it to be easily moved from station to station.

Disclosed anonymously.

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