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Browse Prior Art Database

Visual Reference Monitoring System Processes

IP.com Disclosure Number: IPCOM000037732D
Original Publication Date: 1989-Jun-01
Included in the Prior Art Database: 2005-Jan-29
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Mlynko, WE: AUTHOR [+2]

Abstract

For a process monitor, this system proposes the use of a chemical/visual reflectance test to provide a visual method for monitoring the overall effectiveness and uniformity of the plasma edge (expose) operation.

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This is the abbreviated version, containing approximately 94% of the total text.

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Visual Reference Monitoring System Processes

For a process monitor, this system proposes the use of a chemical/visual reflectance test to provide a visual method for monitoring the overall effectiveness and uniformity of the plasma edge (expose) operation.

According to the system, strips (dots) of a material coated with the organic/seed mixture are applied to the A panel; then, the panel is exposed to the process under which it proceeds. On the completion of the etch operation, the carrier strips are removed. Next, these strips are dipped in a fast additive copper bath for a time that may be predetermined. Removal of these strips, then, will reveal visually or by spectroscopically any reflective copper plating.

By the uniformity of the plating as determined by this process, it will be immediately apparent whether plasma etch process and, therefore, the uniformity of the operation is effective.

The operation an effectiveness of this system will determine to some measure upon the sophistication of the individual employing it. For example, the dots applied could contain geometries or figures that differentiate between degrees of organic etch, and therefore, seed exposure. Automation can pick up on the reflectiveness, or lack thereof, of the copper film deposited, or it can read the geometry left behind by the process. It can key on the chemical structure of the film removing via spectroscopy. In either case, the instant system provides a fast, accurate method of mon...