Browse Prior Art Database

Automated Space Alignment Device

IP.com Disclosure Number: IPCOM000037892D
Original Publication Date: 1989-Aug-01
Included in the Prior Art Database: 2005-Jan-30
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Lee, WT: AUTHOR

Abstract

An automated space alignment device has been developed for handling semiconductor wafers. A pickup positional locator is used to relay the home positional signal to the main tool computer which has been programmed to recalibrate all stop positions for wafer pickup.

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Automated Space Alignment Device

An automated space alignment device has been developed for handling semiconductor wafers. A pickup positional locator is used to relay the home positional signal to the main tool computer which has been programmed to recalibrate all stop positions for wafer pickup.

Programming of a robotic wafer transfer tool requires defining the locations with precision. Space constants, which must be calibrated periodically, are the key element in transferring and orienting wafers. Prior to this development, the adjustments were done manually, a time-consuming tedious task.

The automated space alignment device contains a microswitch 1 (Fig. 1) mounted on top of the switch bracket 2. The bracket is connected to the base 3 by means of a pivot 4 and a spring plunger 5. This sensor gage device is mounted in one of the wafer locations in the cassette at programming time and removed during normal operation. During calibration, the wafer pickup arm contacts the microswitch, which is then able to define its position. The spring plunger functions as a breakaway feature so that should there be a malfunction the sensor gage and pickup mechanism would not be damaged with the plunger's being overridden as the system was reset.

The alignment device makes it possible to quickly and automatically recalibrate the wafer transfer tool and serves to prevent damage to wafers which might otherwise occur.

Disclosed anonymously.

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