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Condensible Vapor Delivery Vessel

IP.com Disclosure Number: IPCOM000038000D
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-31
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Edmonson, DA: AUTHOR [+2]

Abstract

Addition of reactive dopants to noble processing gasses is becoming more common as practitioners attempt to customize thin film properties. Most often these dopants are chosen in gaseous from so as to be easily mixed using commercially available hardware. In certain instances it is desired to use chemicals that are normally liquids. For these compounds it is difficult to maintain a steady flow into a mixing manifold using only the vapor pressure of the substance as a backing pressure. The apparatus described below can be used to mix condensible vapors directly into a carrier gas over a range from .01% to > 5% depending on the vapor pressure of the liquid. (Image Omitted)

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Condensible Vapor Delivery Vessel

Addition of reactive dopants to noble processing gasses is becoming more common as practitioners attempt to customize thin film properties. Most often these dopants are chosen in gaseous from so as to be easily mixed using commercially available hardware. In certain instances it is desired to use chemicals that are normally liquids. For these compounds it is difficult to maintain a steady flow into a mixing manifold using only the vapor pressure of the substance as a backing pressure. The apparatus described below can be used to mix condensible vapors directly into a carrier gas over a range from .01% to > 5% depending on the vapor pressure of the liquid.

(Image Omitted)

A high pressure bomb 2 holds the liquid. The top of the bomb is fitted with a large Tee 3. A small tube 4 carrying the major constituent gas fits inside the through hole of Tee 3 and extends to the bottom of the bomb 2, below the level of the liquid, where it bubbles through a frit. This mixing of the gas with the liquid produces a vapor saturated with the condensible material. The saturated vapor above the liquid escapes through the side of the Tee 3, and is regulated to the final delivery pressure by passing through a diaphragm regulator 5 mounted there. The mix ratio is maintained by delivering the major constituent gas at constant pressure. This is accomplished by admitting the gas into the bomb with a diaphragm pressure regulator 6. The concentration of vapo...