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Planar Non-Reactive Black Body Coating for Molecular Beam Epitaxy (MBE)

IP.com Disclosure Number: IPCOM000038003D
Original Publication Date: 1989-Sep-01
Included in the Prior Art Database: 2005-Jan-31
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Andre, PS: AUTHOR [+4]

Abstract

A planar, non-reactive, black body coating, useful for MBE purposes, is a spun on mixture of a silica gel, 1:4 tetra ethyl ortho silicate : water, and carbon gel (dag in isopropanol). It is applied as follows. After the coating is spun on, it is dried in air at 400oC. Next, either another black body coat is applied or a transparent silica gel film is applied. When a pure silica film is used, it is applied to protect the black body film from attack by strong acids. The second coat is cured at 400oC. The film is then baked at 750oC in Argon for conversion into a non- porous black body coating (emissivity = 1) which is resistant to hot sulfuric acid and other GaAs etches.

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Planar Non-Reactive Black Body Coating for Molecular Beam Epitaxy (MBE)

A planar, non-reactive, black body coating, useful for MBE purposes, is a spun on mixture of a silica gel, 1:4 tetra ethyl ortho silicate : water, and carbon gel (dag in isopropanol). It is applied as follows. After the coating is spun on, it is dried in air at 400oC. Next, either another black body coat is applied or a transparent silica gel film is applied. When a pure silica film is used, it is applied to protect the black body film from attack by strong acids. The second coat is cured at 400oC. The film is then baked at 750oC in Argon for conversion into a non- porous black body coating (emissivity = 1) which is resistant to hot sulfuric acid and other GaAs etches.

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