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Insulating Material for High Recording Density Head

IP.com Disclosure Number: IPCOM000038305D
Original Publication Date: 1989-Dec-01
Included in the Prior Art Database: 2005-Jan-31
Document File: 1 page(s) / 12K

Publishing Venue

IBM

Related People

Chen, MM: AUTHOR [+3]

Abstract

Disclosed is an insulating material of ZrO2 to be used for thin film recording head application with improved properties, such as high electrical breakdown voltage, chemically inert in both acidic and basic environment and suitable thermal expansion coefficient for head fabrication.

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Insulating Material for High Recording Density Head

Disclosed is an insulating material of ZrO2 to be used for thin film recording head application with improved properties, such as high electrical breakdown voltage, chemically inert in both acidic and basic environment and suitable thermal expansion coefficient for head fabrication.

In the thin film recording heads, alumina is generally used as an insulating material for gap as well as for passivation purposes. The alumina film had been demonstrated to be a suitable material for thin film head application. Products using this material has also been in the market. As the need for even higher recording density is anticipated in the near future, the gap thickness of the recording head is expected to be reduced substantially to improve the performance in linear resolution. The main drawback in using thin alumina films is their lack of chemical stability in aqueous basic solution. Solution with a pH range of 12-13 will readily etch sputtered alumina films at a rate of 60 to 100 Angstrom per minute. Such high pH solutions are heavily used in the thin film head process as resist developers for pattern generation. As a result of the high etching rate, the problems of electrical short and poor gap thickness control are the major concern.

The ZrO2 film (with or without Yttrium stabilized oxides) is a good insulating material for future high recording density head with the following desirable properties: 1. Electrical brea...