Browse Prior Art Database

Cantilever System for Chemical Vapor Deposition and Hot Process Furnaces

IP.com Disclosure Number: IPCOM000038366D
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Jan-31
Document File: 1 page(s) / 11K

Publishing Venue

IBM

Related People

Dumontel, A: AUTHOR [+2]

Abstract

This article describes an improved system for loading and unloading silicon wafers into a process tube of a furnace of a diffusion oven. The key advantage of the described system consists in suppressing the friction between the quartz magazines containing the wafers and the quartz process tube. Quartz dust generated by quartz-to-quartz friction is detrimental to product yields. The mechanical system which moves on two rails and is located in the clean-hood furnace and centered with regard of the tube axis system comprises: - A lower tray where the ball rolling is located allowing the shift and positioning of the system. - An upper tray which is movable along four columns. Tray movement is made by a cam (inclined plane) with a pneumatic jack. - Movement in the Y-axis is made by screws.

This text was extracted from a PDF file.
This is the abbreviated version, containing approximately 100% of the total text.

Page 1 of 1

Cantilever System for Chemical Vapor Deposition and Hot Process Furnaces

This article describes an improved system for loading and unloading silicon wafers into a process tube of a furnace of a diffusion oven. The key advantage of the described system consists in suppressing the friction between the quartz magazines containing the wafers and the quartz process tube. Quartz dust generated by quartz-to-quartz friction is detrimental to product yields. The mechanical system which moves on two rails and is located in the clean-hood furnace and centered with regard of the tube axis system comprises: - A lower tray where the ball rolling is located allowing the shift and positioning of the system. - An upper tray which is movable along four columns. Tray movement is made by a cam (inclined plane) with a

pneumatic jack. - Movement in the Y-axis is made by screws.

- On the upper tray is fixed a quartz beam: tube

diameter is 110 mm and a flat part on which is located

the load.

1