Browse Prior Art Database

Compliant End-Of-Arm Robot Tooling for Wafer/Backer Handling

IP.com Disclosure Number: IPCOM000038411D
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Jan-31
Document File: 2 page(s) / 48K

Publishing Venue

IBM

Related People

Brown, ME: AUTHOR [+3]

Abstract

A technique is described whereby compliant end-of-arm robot tooling provides accurate handling of a wafer or backer in clean room environments. The tooling allows for axial and angular offsets not normally recognized by robotic vision systems. The end-of-arm compliance tooling is intended to be operational in a class 100 clean room environment. It is designed to be attached to a robot arm so as to facilitate the positioning of wafers into nest holes of a stainless steel dome. A disk or backer is then placed on top of the wafer to act as a clamp and heat sink. The dome is then exposed to sputtering which deposits layers of metal onto the wafers. In prior art, the robotic vision system provided only two-dimensional positioning.

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Compliant End-Of-Arm Robot Tooling for Wafer/Backer Handling

A technique is described whereby compliant end-of-arm robot tooling provides accurate handling of a wafer or backer in clean room environments. The tooling allows for axial and angular offsets not normally recognized by robotic vision systems. The end-of-arm compliance tooling is intended to be operational in a class 100 clean room environment. It is designed to be attached to a robot arm so as to facilitate the positioning of wafers into nest holes of a stainless steel dome. A disk or backer is then placed on top of the wafer to act as a clamp and heat sink. The dome is then exposed to sputtering which deposits layers of metal onto the wafers. In prior art, the robotic vision system provided only two- dimensional positioning. The compliant end-of-arm tooling, described herein, provides for dimensional variations which may occur between various steel domes. The compliant tooling, as shown in the figure, is attached to robot arm 1 by means of mounting plate 2. The major parts of the compliant tooling consists of ball vacuum chuck 3, housing 4, metal bellows 5, TEFLON* socket 6, set plug 7, plug 8, stud 9, spring 10, and TEFLON washer 11. There are two operational modes: a set-up mode and a run mode. During the set-up mode, ball vacuum chuck 3 is locked into position so as to establish a nominal part location for the robot. Set plug 7 is positioned onto housing 4 and is screwed around stud 9 until socket...