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Xyz Travelling Support

IP.com Disclosure Number: IPCOM000038436D
Original Publication Date: 1987-Jan-01
Included in the Prior Art Database: 2005-Jan-31
Document File: 2 page(s) / 32K

Publishing Venue

IBM

Related People

Muralt, PR: AUTHOR

Abstract

This support is useful for displacing an object, or a tool, in horizontal and vertical directions with steps in the nanometer range. The support employs the well-known double-wedge principle: When two wedges are moved against one another, the upper wedge (1) climbs on the back of the lower (2). Here, the lower wedge is divided into two parts 2a and 2b, the parts being interconnected by a piezoelectric element 3. Each one of the parts 2a, 2b rests with three feet F on a metallic base plate 4. Each foot F comprises a sphere 5 resting in a conical hole in its associated wedge, and an anodized aluminium disk 6 likewise having a conical hole. The isolating oxide layer on their lower surface allows the feet to be electrostatically clamped to base plate 4.

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Xyz Travelling Support

This support is useful for displacing an object, or a tool, in horizontal and vertical directions with steps in the nanometer range. The support employs the well-known double-wedge principle: When two wedges are moved against one another, the upper wedge (1) climbs on the back of the lower (2). Here, the lower wedge is divided into two parts 2a and 2b, the parts being interconnected by a piezoelectric element 3. Each one of the parts 2a, 2b rests with three feet F on a metallic base plate 4. Each foot F comprises a sphere 5 resting in a conical hole in its associated wedge, and an anodized aluminium disk 6 likewise having a conical hole. The isolating oxide layer on their lower surface allows the feet to be electrostatically clamped to base plate 4. The partitioned wedge 2a, 2b can move in the x-direction by alternately clamping the feet of one of its parts and releasing the feet of the other part, and expanding or contracting piezoelectric element 3. Upper wedge 1 rests with its three feet on the backs of partial wedges 2a and 2b, being guided between a pair of stops 7 and 8. Thus, wedge 1 can only move in the z-direction. If wedge 1 and base plate 4 have a common electric potential, wedge 1 is clamped to the clamped part of wedge 2. Hence, a horizontal excursion of wedge 1 is impossible, and the stops 7 and 8 may be omitted. Likewise, a horizontal movement of wedge 1 is obtained by clamping wedge 1 to the moving part of wedge 2. In this c...