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Rf-Powered Sampling Electrode

IP.com Disclosure Number: IPCOM000038991D
Original Publication Date: 1987-Apr-01
Included in the Prior Art Database: 2005-Feb-01
Document File: 2 page(s) / 59K

Publishing Venue

IBM

Related People

McCarthy, TD: AUTHOR [+3]

Abstract

Disclosed is an RF-powered plasma electrode which is designed to (1) monitor the reaction products of the plasma-sample in situ and (2) heat or cool the sample simultaneously with such monitoring. As shown in the drawings, this is implemented by embedding heater elements including heater wires 10 and a heater plate 12, a thermocouple (not shown) and cooler elements including a water-in tube 14 and a water-out tube 16. Furthermore, gas-sampling grooves 18 are formed beneath the sample and extending outside the periphery of the sample which allow the reaction products to be monitored through a gas sampling tube 20 connected to a mass spectrometer 22 at one end and the gas-sampling grooves 18 at the other end.

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Rf-Powered Sampling Electrode

Disclosed is an RF-powered plasma electrode which is designed to (1) monitor the reaction products of the plasma-sample in situ and (2) heat or cool the sample simultaneously with such monitoring. As shown in the drawings, this is implemented by embedding heater elements including heater wires 10 and a heater plate 12, a thermocouple (not shown) and cooler elements including a water-in tube 14 and a water-out tube 16. Furthermore, gas-sampling grooves 18 are formed beneath the sample and extending outside the periphery of the sample which allow the reaction products to be monitored through a gas sampling tube 20 connected to a mass spectrometer 22 at one end and the gas- sampling grooves 18 at the other end. The novelty of the present design resides in that the sample can be treated with a plasma in situ, and the reaction products can be directly monitored using mass spectrometry, while heating or cooling the electrode and applying RF power from a microwave guide (not shown) located in front of the electrode. Conventionally, the mass spectrometer is attached to a wall of the chamber, where the entire plasma and its products are monitored. In the present design, the reaction products of the plasma-sample are mainly monitored. Referring to the drawings, a cross-sectional view through 3-3 shows the top surface of the electrode with portions of the gas-sampling grooves 18 arranged in the shape of a cross. The gas-sampling tube 20 connect...