Browse Prior Art Database

Position-Sensitive Multianode Detector

IP.com Disclosure Number: IPCOM000039068D
Original Publication Date: 1987-Apr-01
Included in the Prior Art Database: 2005-Feb-01
Document File: 2 page(s) / 48K

Publishing Venue

IBM

Related People

Haight, R: AUTHOR [+3]

Abstract

Multianode detectors for detecting electrons, photons, or ions are commercially available, having a shielded or unshielded wire for each anode, where the wires are inside the vacuum. Besides having an inadequate number of channels and hence limited resolution, the high number of wires presents an outgassing problem which limits the achievable vacuum. The design of Figs. l and 2 allows the fabrication of l00 or more anodes, without the outgassing problem. The design (Fig. l) includes a re-entrant glass tube l0 which can protrude into the vacuum system sufficiently far to position the channel plates l2/multianode l4 assembly at the exit of an energy-dispersive analyzer. The base of the glass tube l0 has a glass-to-metal weld l6, and the metal base l8 is a conflat flange of standard size.

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Position-Sensitive Multianode Detector

Multianode detectors for detecting electrons, photons, or ions are commercially available, having a shielded or unshielded wire for each anode, where the wires are inside the vacuum. Besides having an inadequate number of channels and hence limited resolution, the high number of wires presents an outgassing problem which limits the achievable vacuum. The design of Figs. l and 2 allows the fabrication of l00 or more anodes, without the outgassing problem. The design (Fig. l) includes a re-entrant glass tube l0 which can protrude into the vacuum system sufficiently far to position the channel plates l2/multianode l4 assembly at the exit of an energy-dispersive analyzer. The base of the glass tube l0 has a glass-to-metal weld l6, and the metal base l8 is a conflat flange of standard size. This is mated to a bellows to provide for exact positioning of the front of the detector. The front of the detector consists of a circular flat glass area 20 through which an array 22 of wires extends. The wires as well as the glass have been ground flat on the vacuum side so that they appear as tabs of metal. Mounting sites 23 are provided for the multichannel plate assembly. On the air side, these wires extend out of the tube and will be coaxially shielded since they carry the high frequency signals from each of the anodes l4. Strips 24 of metal (Fig. 2) are deposited lithographically on top of each of the metal tabs on the vacuum side, one...