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Shielded Glass Slide Unit

IP.com Disclosure Number: IPCOM000039315D
Original Publication Date: 1987-May-01
Included in the Prior Art Database: 2005-Feb-01
Document File: 2 page(s) / 42K

Publishing Venue

IBM

Related People

Busacco, RA: AUTHOR

Abstract

In the vacuum deposition process of thin films it is often necessary to measure the thickness and composition of a particular layer. Glass slides or sample substrates are normally used for measurement purposes. When multiple layers of deposition are of similar composition and are adjacent to each other, it becomes difficult to successfully etch away the top layer without infringing on the desired layer to be measured. This problem is eliminated with the utilization of a glass slide holding device that retracts from the deposition field to act as a shield to prevent unwanted layers of deposition that are applied subsequent to thin film deposition. The shielded glass slide (SGS) unit comprises L-shaped bracket 10 with upper and horizontal slots 11 and 12.

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Shielded Glass Slide Unit

In the vacuum deposition process of thin films it is often necessary to measure the thickness and composition of a particular layer. Glass slides or sample substrates are normally used for measurement purposes. When multiple layers of deposition are of similar composition and are adjacent to each other, it becomes difficult to successfully etch away the top layer without infringing on the desired layer to be measured. This problem is eliminated with the utilization of a glass slide holding device that retracts from the deposition field to act as a shield to prevent unwanted layers of deposition that are applied subsequent to thin film deposition. The shielded glass slide (SGS) unit comprises L-shaped bracket 10 with upper and horizontal slots 11 and 12. Supported on bracket 10 is an actuator mechanism consisting of rotatable shaft 13 with horizontal upper and lower pins 14 and 15 extending through slots 11 and 12. With pins 14 and 15 centered within slots 11 and 12, cartridge 16, loaded with glass slides 17, is placed within guide bracket 18 of bracket 10 where it is held in the "up" position by pin 14. Rotation of the lower pin 15, either right or left, causes pin 14, a much shorter pin, to withdraw within slot 11 and thereby release cartridge 16 and slides 17 for descent to the position determined by adjustable stop screw 19 in vertical slot 20. As seen in Fig. 2, the bracket 10 is attached to base plate 21 of a vacuum deposition chamb...