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Probe-To-Product Alignment Technique and Gauge

IP.com Disclosure Number: IPCOM000039647D
Original Publication Date: 1987-Jul-01
Included in the Prior Art Database: 2005-Feb-01
Document File: 2 page(s) / 39K

Publishing Venue

IBM

Related People

Buechele, AW: AUTHOR [+2]

Abstract

An alignment tool has been proposed to improve the precision alignment required between the probe of a multilevel ceramic (MLC) electrical tester and the substrate of a semiconductor device. The tool consists of two precision glass masters, probe gauge block, and borescope. Referring to the drawing, the measurement technique requires that the probe 1 of the probe assembly 12 be accurately aligned with the product or gauge precision alignment master 6 and the X, Y, r, and 180o rotation stage 8 so as to assure proper mechanical contact during the electrical test. A support casting 4 is sandwiched between two precision glass masters 2 to make up one assembly which is attached to an equipment precision reference point. The precision alignment master 6 or substrate is clamped in the product-holding device 7.

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Probe-To-Product Alignment Technique and Gauge

An alignment tool has been proposed to improve the precision alignment required between the probe of a multilevel ceramic (MLC) electrical tester and the substrate of a semiconductor device. The tool consists of two precision glass masters, probe gauge block, and borescope. Referring to the drawing, the measurement technique requires that the probe 1 of the probe assembly 12 be accurately aligned with the product or gauge precision alignment master 6 and the X, Y, r, and 180o rotation stage 8 so as to assure proper mechanical contact during the electrical test. A support casting 4 is sandwiched between two precision glass masters 2 to make up one assembly which is attached to an equipment precision reference point. The precision alignment master 6 or substrate is clamped in the product-holding device 7. The X, Y, r, and 180o rotation stage 8 is driven up and/or the probe assembly 12 is driven down to apply pressure to the sandwiched assembly 2, 4, thereby eliminating any side thrust. The borescope assembly 13 is inserted into the borescope insertion fitting 5 with viewing set for either up or down. If viewing up, the image of the probe 1 or probe gauge block will be viewed through the chrome mask opening 3. If correctly aligned, the image will appear in the center of the chrome mask opening. If not aligned, the proper adjustment may be made. When viewing down, the image of the solid chrome window 10 will be viewed th...