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Browse Prior Art Database

Coarse/Fine Approach Mechanism

IP.com Disclosure Number: IPCOM000039712D
Original Publication Date: 1987-Jul-01
Included in the Prior Art Database: 2005-Feb-01
Document File: 2 page(s) / 99K

Publishing Venue

IBM

Related People

Gimzewski, JK: AUTHOR [+2]

Abstract

In the microscope art, in particular in connection with scanning tunneling microscopes, vacuum-compatible mechanisms for performing coarse- and fine-approach operations at high stability and precision are required. The mechanism described below permits the linear translation of an object by means of a rotary drive which acts on an arrangement of differential springs. Supported on a rigid plate 1 is a stack of copper rings 2 with intermediate elastic cushions 3 for the attenuation of ambient vibrations. On top of the stack rests a supporting plate 4 to which a frame 5 is secured. Bottom plate 6 of frame 5 may, for example, carry the tip 7 of a scanning tunneling microscope. Guided inside frame 5 is a first cage 8 having rims 9 on which a plurality of cup springs 10 rest with their outer peripheries.

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Coarse/Fine Approach Mechanism

In the microscope art, in particular in connection with scanning tunneling microscopes, vacuum-compatible mechanisms for performing coarse- and fine- approach operations at high stability and precision are required. The mechanism described below permits the linear translation of an object by means of a rotary drive which acts on an arrangement of differential springs. Supported on a rigid plate 1 is a stack of copper rings 2 with intermediate elastic cushions 3 for the attenuation of ambient vibrations. On top of the stack rests a supporting plate 4 to which a frame 5 is secured. Bottom plate 6 of frame 5 may, for example, carry the tip 7 of a scanning tunneling microscope. Guided inside frame 5 is a first cage 8 having rims 9 on which a plurality of cup springs 10 rest with their outer peripheries. On the inner peripheries of cup springs 10 rest the rims 11 of a second cage 12, the bottom 13 of which carries a sample holder (or tool holder) 14 for a sample 21. Placed inside said second cage 12 is a helical spring 15, the upper end of which rests against a pressure member 16. The first cage 8 is connected to a screw 17 received in a thread in supporting plate 4. Screw 17 has a central threaded bore 18 which receives an inner screw 19. The lower end of screw 19 rests in a depression 20 machined into pressure member 16. Rotation of screw 17 will result in a coarse displacement of said first cage 8 inside frame 5. Rotation of screw 19...