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Piezoelectric Travelling Support

IP.com Disclosure Number: IPCOM000039720D
Original Publication Date: 1987-Jul-01
Included in the Prior Art Database: 2005-Feb-01
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Reh, HK: AUTHOR [+2]

Abstract

This travelling support consists of a T-shaped table 1 of piezoelectric material carrying pairs of electrodes 2, 3 and 4, 5 coated, respectively, onto sections 6 and 7 of table 1. The pairs of electrodes 2, 3 and 4, 5 are mutually insulated at the joint of sections 6 and 7. This allows for independent control of those sections. Table 1 rests on three feet 9, 10 and 11 of which the lower ends rest on a dielectric layer 12 which may be coated onto the bottom surface of the feet or disposed between the feet and the surface of the bench 13 on which the support is to travel. Movement of this support is achieved by selectively controlling section 6 and 7 of table 1 for contraction or expansion.

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Piezoelectric Travelling Support

This travelling support consists of a T-shaped table 1 of piezoelectric material carrying pairs of electrodes 2, 3 and 4, 5 coated, respectively, onto sections 6 and 7 of table 1. The pairs of electrodes 2, 3 and 4, 5 are mutually insulated at the joint of sections 6 and 7. This allows for independent control of those sections. Table 1 rests on three feet 9, 10 and 11 of which the lower ends rest on a dielectric layer 12 which may be coated onto the bottom surface of the feet or disposed between the feet and the surface of the bench 13 on which the support is to travel. Movement of this support is achieved by selectively controlling section 6 and 7 of table 1 for contraction or expansion. For example, if the support is to travel to the right on bench 13, foot 10 may be electrostatically clamped to the bench by applying a potential across dielectric 12. Then a potential is applied to electrodes 2 and 3 causing section 6 to contract. Upon contraction, foot 9 is clamped to bench 13, and foot 10 released. Removal of the contraction potential will then permit table 1 to assume its relaxed state, and this will result in foot 10 being displaced in x-direction to the right. Likewise, movement in y-direction is possible, too. Thus, the travelling of table 1 occurs in steps. The minimum step length is on the order of tens of nanometers.

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