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Simultaneous Spin Polarization and Auger Electron Analysis

IP.com Disclosure Number: IPCOM000040027D
Original Publication Date: 1987-Sep-01
Included in the Prior Art Database: 2005-Feb-01
Document File: 2 page(s) / 40K

Publishing Venue

IBM

Related People

Gasser, M: AUTHOR [+4]

Abstract

Auger electron spectroscopy is a well-established technique for obtaining quantitative information on the spatial distribution of elements in and/or on a specimen: A collimated electron beam with a kinetic energy of typically 3 - 5 keV hits the specimen to produce scattered electrons which have interacted with the innershell electrons of the various atoms of the specimen. The scattered electrons are energy-analyzed, detected and amplified by a photomultiplier or channeltron. The spin polarization of the backscattered electrons contains information on the magnetic domain distribution and surface magnetization of the specimen.

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Simultaneous Spin Polarization and Auger Electron Analysis

Auger electron spectroscopy is a well-established technique for obtaining quantitative information on the spatial distribution of elements in and/or on a specimen: A collimated electron beam with a kinetic energy of typically 3 - 5 keV hits the specimen to produce scattered electrons which have interacted with the innershell electrons of the various atoms of the specimen. The scattered electrons are energy-analyzed, detected and amplified by a photomultiplier or channeltron. The spin polarization of the backscattered electrons contains information on the magnetic domain distribution and surface magnetization of the specimen. Known in the art are separate instruments for investigating either the Auger electrons or the spin polarization, with the problem of finding the very spot investigated when the specimen has to be transferred to the other instrument. Simultaneous spin polarization and Auger electron analysis is performed by the apparatus shown in the figure. A collimated electron beam 1 with a kinetic energy of between 3 and 5 keV impinges upon the specimen 2 to produce scattered electrons 3 which are energy-analyzed in a conventional analyzer 4. The output port 5 of analyzer 4 is connected to a stainless steel cylinder 6. The electron beam 7 enters cylinder 6 through a pair of apertures 8 and 9 to avoid scattering from the walls. Inside, the cylinder is covered with graphite which has low secondary el...