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Browse Prior Art Database

Hermetic Seal Detector for Ceramic Substrates

IP.com Disclosure Number: IPCOM000040273D
Original Publication Date: 1987-Oct-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 2 page(s) / 78K

Publishing Venue

IBM

Related People

Ormond, DW: AUTHOR [+2]

Abstract

This article describes an assembly fixture and process for quantitatively measuring the hermeticity of metallized ceramic substrates. The disclosed method of detection is non-destructive, fast, and yields quantitative information. (Image Omitted) Fig. 1 shows the side view of a ceramic substrate clamping fixture 1 holding a substrate 2 whose outer edges have been ground to form a smooth surface 3, which can be later employed in forming a hermetic seal. The bottom surface 4 of the fixture is polished for vacuum coupling purposes. Elastomer gaskets 5, 6, and 7 are used in combination with the smooth outer edge of the substrate, to seal off its bottom surface. Also shown in the drawing are a clamping screw 8, a (Image Omitted) bottom support piece 9 and the support adjustment screw 10.

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Hermetic Seal Detector for Ceramic Substrates

This article describes an assembly fixture and process for quantitatively measuring the hermeticity of metallized ceramic substrates. The disclosed method of detection is non-destructive, fast, and yields quantitative information.

(Image Omitted)

Fig. 1 shows the side view of a ceramic substrate clamping fixture 1 holding a substrate 2 whose outer edges have been ground to form a smooth surface 3, which can be later employed in forming a hermetic seal. The bottom surface 4 of the fixture is polished for vacuum coupling purposes. Elastomer gaskets 5, 6, and 7 are used in combination with the smooth outer edge of the substrate, to seal off its bottom surface. Also shown in the drawing are a clamping screw 8, a

(Image Omitted)

bottom support piece 9 and the support adjustment screw 10. The bottom support piece 9, made of steel, helps to support the ceramic substrate and is shown in greater detail in Fig. 2 (top view) and Fig. 3 (side view). The openings 11 in the support piece correspond to pin or pad positions on the bottom substrate surface and provide a path for any gas penetrating through the substrate from the top surface. Fig. 4 shows the fixtured substrate 2 under test for leaks with a vacuum pump station He leak detector 12. The disclosed assembly fixture is attached to the He leak detector through a quick vacuum coupling 13 to measure the rate of gas flow through the ceramic. A small quantity of He gas is applie...