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Unique Construction of High Accuracy Multipole Electric E-Beam Deflectors

IP.com Disclosure Number: IPCOM000040363D
Original Publication Date: 1987-Nov-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 2 page(s) / 30K

Publishing Venue

IBM

Related People

Johnson, GJ: AUTHOR [+4]

Abstract

The fabrication of electric multipole deflectors for application in high resolution, high accuracy electron-beam (E-beam) lithography tools requires a level of precision difficult to achieve with conventional techniques. The fabrication technique and structure of the electric multipole deflector described meet this requirement. The multipoles are electrically isolated without physical separation. Irrespective of the number of elements employed, multipole deflectors must have the following attributes: 1) Very high mechanical accuracy to minimize field and spot distortions. 2) Low capacitance and leakage to allow high speed deflection, requiring a minimum of bulk material and short connecting leads.

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Unique Construction of High Accuracy Multipole Electric E-Beam Deflectors

The fabrication of electric multipole deflectors for application in high resolution, high accuracy electron-beam (E-beam) lithography tools requires a level of precision difficult to achieve with conventional techniques. The fabrication technique and structure of the electric multipole deflector described meet this requirement. The multipoles are electrically isolated without physical separation. Irrespective of the number of elements employed, multipole deflectors must have the following attributes: 1) Very high mechanical accuracy to minimize field and spot distortions.

2) Low capacitance and leakage to allow high speed deflection,

requiring a minimum of bulk material and short connecting

leads.

3) Non-conductive material used for the bulk deflector so

no eddy currents are generated in the presence of dynamic

magnetic fields. Quartz or special ceramics are suitable.

4) Surfaces exposed to the electron beam to be conductive, e.g.,

coated with a thin layer of non-oxidizing material, e.g., gold.

5) Minimum thermal effects on the deflector size and position.

The construction technique is illustrated in the drawing. The multipole deflector is fabricated from a single tube of insulating material. For reasons of thermal stability, materials with a low coefficient of expansion are preferred, i.e., quartz or certain ceramics. In the construction shown, a ceramic is employed. The tubes are each 8.0...