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Improved Metal Grid Fabrication Technique

IP.com Disclosure Number: IPCOM000040478D
Original Publication Date: 1987-Nov-01
Included in the Prior Art Database: 2005-Feb-02
Document File: 2 page(s) / 41K

Publishing Venue

IBM

Related People

Speidell, JL: AUTHOR

Abstract

A technique is described whereby the fabrication of wire mesh metal grids, as used in applications which apply an electric field for the purpose of manipulating charged particles, is improved so as to eliminate grid distortions which can occur due to high operating temperatures. Metal grids are used in applications such as: a) extraction grids, as used in Kaufman-type ion beam sources, b) retarding grid analyzers, as used in neutrino detection and measurement, and c) Faraday grids, as used in electron microscopes. They are generally fabricated from woven metal mesh, spot welded to a support substrate or are made from semiconductor materials using microelectronic processing techniques. The spot-welded grids present problems of short operational life due to inadequate fastening.

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Improved Metal Grid Fabrication Technique

A technique is described whereby the fabrication of wire mesh metal grids, as used in applications which apply an electric field for the purpose of manipulating charged particles, is improved so as to eliminate grid distortions which can occur due to high operating temperatures. Metal grids are used in applications such as:
a) extraction grids, as used in Kaufman-type ion beam sources, b) retarding grid analyzers, as used in neutrino detection and measurement, and c) Faraday grids, as used in electron microscopes. They are generally fabricated from woven metal mesh, spot welded to a support substrate or are made from semiconductor materials using microelectronic processing techniques. The spot-welded grids present problems of short operational life due to inadequate fastening. They have a tendency to distort when used at high temperatures, resulting in ion beam profile changes. The improved fabrication process described herein overcomes these problems. First, the selection of material must be such that the wire mesh grids be significantly harder than the support substrate, such as stainless steel, INCONEL*, tantalum, tungsten and molybdenum. Suitable materials for the softer support substrate could be typically aluminum, indium, copper or gold. In the fabrication process, the wire mesh and the substrate is positioned between two steel discs, as shown in Fig. 1. The mesh is securely fastened to the substrate by applying pr...